What you smell is not ozone; the equipment is being oxidized and that is what you smell. It is completely safe. Some suggestions to lessen the smell:
1) Have you used the pre-wash?
2) Set the time back to 5 minutes or less.
3) Blow air from the CPAP through the mask before using it.
4) Do not use fragrance wipes or anything else with a fragrance in it to clean your equipment as this will intensify the smell.